Arriving at the nanoscale is so simple, yet so difficult, if one pursues a hierarchical assembly with engineering precision.

We integrate two workhorses of nanoscale engineering in a batch-compatible fashion: microelectromechanical systems (MEMS) and nanowires. The result is one dynamic miniaturized sensor for measuring ultimately small forces. Compared to conventional microsensors, the hybrid devices are highly sensitive, more immune to noise, and take up several orders of magnitude less space.

The melding of MEMS and nanowire is the most important aspect of the technology. Fabricating the nanowire on the top surface of the MEMS provides ease of access to carry out processes such as doping and contact formation, and thus, allows us to transform—using standard industry methods—these integrated systems into very efficient electromechanical sensors at the nanoscale.